SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment -

Abstract

This Safety Guideline provides a set of design-based electrical safety considerations for production equipment used in the semiconductor industry. Basic product safety concerns are addressed by satisfying the design, construction, and testing principles set in this Safety Guideline for protection against electrical shock or fire risk. The intent is to provide a design based electrical document that will be useful to both design engineers and evaluators, in order to facilitate electrical safety in the equipment.

This Safety Guideline provides a set of design based electrical safety considerations for production equipment used in the semiconductor industry.

Basic product safety concerns can be addressed by satisfying the design, construction, and testing principles set forth in this Document or by satisfying the requirements of applicable electrical safety standards.

This Safety Guideline applies to semiconductor manufacturing equipment.

Included in this Safety Guideline are design considerations for electrical safety interlocks that protect against electrical as well as nonelectrical safety hazards; and nonelectrical interlocks that protect against electrical safety hazards.

This Document applies to the electrical design for all equipment used to manufacture, measure, assemble, and test semiconductor products unless the equipment is specifically excluded. See §  3 , Limitations.

This Safety Guideline applies to equipment intended to be powered by hazardous voltages or hazardous electrical power.

 

Referenced SEMI Standards (purchase separately)

SEMI E33 — Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S3 — Safety Guideline for Process Liquid Heating System

SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

 

Revision History

SEMI S22-0718E (editorial revision)

SEMI S22-0718 (technical revision)

SEMI S22-0715bE (editorial revision)

SEMI S22-0715b (technical revision)

SEMI S22-0715a (delayed revision)

SEMI S22-0715 (technical revision)

SEMI S22-0712a (delayed revision)

SEMI S22-0712 (technical revision)

SEMI S22-1110c (delayed revision)

SEMI S22-1110b (delayed revision)

SEMI S22-1110a (delayed revision)

SEMI S22-1110 (technical revision)

SEMI S22-0709b (delayed revision)

SEMI S22-0709a (delayed revision)

SEMI S22-0709 (technical revision)

SEMI S22-0706b (delayed revision)

SEMI S22-0706a (delayed revision)

SEMI S22-0706 (technical revision)

SEMI S22-1103bE (editorial revision)

SEMI S22-1103b (delayed revision)

SEMI S22-1103a (delayed revision)

SEMI S22-1103 (first published)

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